Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions
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| Sputter deposition of Si. | | Sputter deposition of Si. | ||
| | | Ion beam sputter deposition of Si. | ||
| Sputter deposition of Si. '''Not''' recommended as first choice for Si deposition. | | Sputter deposition of Si. '''Not''' recommended as first choice for Si deposition. | ||
| Line 49: | Line 49: | ||
|None | |None | ||
|None | |None | ||
|- | |- | ||
| Line 168: | Line 166: | ||
* SU-8 | * SU-8 | ||
* Any metals | * Any metals | ||
| | | Only those above (under allowed substrates). | ||
| | | | ||
* Silicon oxide | * Silicon oxide | ||