Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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'''Baking''' | '''Baking''' | ||
120sec on 120C hot plate | 120sec on 120C hot plate | ||
120sec on 220C hot plate | 120sec on 220C hot plate. (Spinning curve made by Alexandra Lupi <allu@fotonik.dtu.dk>) | ||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||