Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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''' HSQ: FOX-15''' | ''' HSQ: FOX-15''' | ||
Spinning curve for[[media: | Spinning curve for[[media:Spin_curve_Fox-15.pdf| FOX-15]]. | ||
Process parameters making the recipe: | Process parameters making the recipe: | ||
'''Prebaking''' | '''Prebaking''' | ||