Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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Spinning curve for[[media:Spin_curve_nLoF2020.pdf| AZ nLoF 2020]]. | Spinning curve for[[media:Spin_curve_nLoF2020.pdf| AZ nLoF 2020]]. | ||
Process parameters making the recipe: | |||
'''Spinning''' | |||
speed: xxxprm | |||
acceleration: 1000rpm/s | |||
time: 30s | |||
'''Baking''' | |||
60sec on 110C hot plate | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||