Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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'''AZ 5214E''' | '''AZ 5214E''' | ||
Spinning curve for AZ 5214E. | Spinning curve for AZ 5214E.|[[media:AZ5214E_spin_curve.pdf|AZ5214E]] | ||
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Spinning curve for AZ nLoF 2020. | Spinning curve for AZ nLoF 2020. | ||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||