Specific Process Knowledge/Thin film deposition/Deposition of TiW: Difference between revisions
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Deposition of TiW alloy can be done in the Wordentec. | Deposition of TiW alloy can be done in the Wordentec. | ||
'''Observe:''' ''right now we don´t have a TiW target for Wordentec, please contact thinfilm@danchip.dtu.dk if you are interested in depositing TiW.'' | |||
==Sputtering of TiW== | |||
* [[/Sputtering of TiW in Wordentec|Sputtering of TiW in Wordentec]] | |||
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