Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

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 == Comparison of EDX, SIMS and XPS ==
-{| border="1" cellspacing="0" cellpadding="4" align="center"
-!width="100"|
+{| border="2" cellspacing="0" cellpadding="4" align="center"
-!width="250" | SEM with EDX
+!width="100" style="background:silver; color:black" |
-!width="250" | SIMS
+!width="250" style="background:silver; color:black" | SEM with EDX
-!width="250" | XPS
+!width="250" style="background:silver; color:black" | SIMS
-|-
+!width="250" style="background:silver; color:black" | XPS
-! Full name
+|- valign="top"
-|| Energy Dispersive X-ray Analysis
+! rowspan="2" style="background:silver; color:black" width="60" | Full name
-|| Secondary Ion Mass Spectroscopy
+! rowspan="2" style="background:WhiteSmoke; color:black" | Energy Dispersive X-ray Analysis
-|| X-ray Photoelectron Spectroscopy
+! rowspan="2" style="background:WhiteSmoke; color:black" | Secondary Ion Mass Spectroscopy
+! rowspan="2" style="background:WhiteSmoke; color:black" | X-ray Photoelectron Spectroscopy
 |-
 !  Technique
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 || Quite fast and easy
 |}
 == Comparison of EDX, SIMS and XPS ==