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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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==SU8 hotplates==
==SU8 hotplates==
[[Image:su8_bench.jpg|200x200px|thumb|SU-8 bench in C-1]]
[[Image:su8_bench.jpg|200x200px|thumb|SU-8 bench in C-1]]
We have four dedicated SU-8 hotplates in CR3.
We have two dedicated SU-8 hotplates in CR3.
Users can control the ramp-time, time and temperature.
Users can control the ramp-time, the baking temperature, and the baking time.
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