Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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== Deposition of Aluminium == | == Deposition of Aluminium == | ||
Aluminium can be deposited by e-beam evaporation, by sputtering and by thermal evaporation. In the chart below you can compare the different methods on the different deposition equipment. | Aluminium can be deposited by e-beam evaporation, by sputtering and by thermal evaporation. In the chart below you can compare the different methods on the different deposition equipment. | ||
==Sputtering of Aluminium== | |||
*[[/Sputter rates for Al PVD co-sputter/evaporation|Sputtering of Aluminium of PVD co-sputter/evaporation]] | |||
*[[/Sputter rates for Al|Sputtering of Aluminium of Wordentec]] | |||
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