Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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The following links give an approximate oxide time/thickness based on a general formula. | The following links give an approximate oxide time/thickness based on a general formula. | ||
* [http://www.cleanroom.byu.edu/OxideTimeCalc.phtml Know thickness - | * [http://www.cleanroom.byu.edu/OxideTimeCalc.phtml Know thickness - calculate oxidation time] | ||
* [http://www.cleanroom.byu.edu/OxideThickCalc.phtml Know time - | * [http://www.cleanroom.byu.edu/OxideThickCalc.phtml Know time - calculate oxide thickness] | ||
===Wet Oxidation on <100>=== | ===Wet Oxidation on <100>=== | ||