Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
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*Wet anneal with H<sub>2</sub>O in a bubbler can be done in furnaces:C1 and C3. | *Wet anneal with H<sub>2</sub>O in a bubbler can be done in furnaces:C1 and C3. | ||
==Comparison of the annealing furnaces== | |||
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