Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions
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*1-25 wafers of 4" | *1-25 wafers of 4" | ||
*For other sizes ask the | *For other sizes ask the ThinFilm group | ||
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*24x2" wafers or | *24x2" wafers or | ||
*6x4" wafers or | *6x4" wafers or | ||
*6x6" wafers | *6x6" wafers | ||
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* Several small samples mounted with capton tape | |||
* 1x 50 mm wafer | |||
* 1x 100 mm wafer | |||
* 1x 150 mm wafer | |||
* 1x 200 mm wafer | |||
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