Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
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|'''Chemical solution''' | |'''Chemical solution''' | ||
|Sulfuric acid (98%) and Ammonium | |Sulfuric acid (98%) and Ammonium persulfate | ||
|Sulfuric acid (98%) and Ammonium | |Sulfuric acid (98%) and Ammonium persulfate | ||
|Sulfuric acid (98%) and Hydrogen peroxide (30%) in the ratio 4:1. First add H<sub>2</sub>SO<sub>4</sub> into a glass beaker then add H<sub>2</sub>O<sub>2</sub><sup>{{fn|1}}</sup>. | |Sulfuric acid (98%) and Hydrogen peroxide (30%) in the ratio 4:1. First add H<sub>2</sub>SO<sub>4</sub> into a glass beaker then add H<sub>2</sub>O<sub>2</sub><sup>{{fn|1}}</sup>. | ||
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