Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
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|98% Sulfuric acid and Ammonium sulfate | |98% Sulfuric acid and Ammonium sulfate | ||
|98% Sulfuric acid and Ammonium sulfate | |98% Sulfuric acid and Ammonium sulfate | ||
|98% Sulfuric acid and Hydrogen peroxide 4:1 First add H<sub>2</sub>SO<sub>4</sub> into a glass beaker then add H<sub>2</sub>O<sub>2</sub><sup>{{fn|1}}</sup>. | |98% Sulfuric acid and 30% Hydrogen peroxide 4:1 First add H<sub>2</sub>SO<sub>4</sub> into a glass beaker then add H<sub>2</sub>O<sub>2</sub><sup>{{fn|1}}</sup>. | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||