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Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions

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Contact the pvd-group if you have special needs (pvd@danchip.dtu.dk).
Contact the pvd-group if you have special needs (pvd@danchip.dtu.dk).
====Sputter rate====


==Overview of the performance of Sputter-System(Lesker) and some process related parameters==
==Overview of the performance of Sputter-System(Lesker) and some process related parameters==
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