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Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

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The [[/Supra60VP|Supra 60 VP SEM]] is basically the same as the Zeiss SEM but with some additional features such as an airlock and an EDX detector.
The [[/Supra60VP|Supra 60 VP SEM]] is basically the same as the Zeiss SEM but with some additional features such as an airlock and an EDX detector.
The [[/FEI|FEI SEM]] is a versatile microscope with two vacuum modes (High Vacuum and Low Vacuum) and 6 different detectors, offering excellent resolution on any type of sample or material including graphene and carbon nanotubes. Somewhat more fragile compared to the robust Leo, it is our intention that only users with special needs (for instance thick polymers, glass substrates or EDX/micromanipulator experiments) that will be trained.


Outside the cleanroom in the basement of building 346, the [[/Jeol|Jeol SEM]] provides a possibilty of imaging samples that do not go into the cleanroom.
Outside the cleanroom in the basement of building 346, the [[/Jeol|Jeol SEM]] provides a possibilty of imaging samples that do not go into the cleanroom.
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