Specific Process Knowledge/Thin film deposition/Deposition of Palladium: Difference between revisions

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 |-
 |-style="background:WhiteSmoke; color:black"
-! Batch size
+! General description
-|
+| E-beam deposition of Pd
-*Up to 1x4" wafers
-*smaller pieces
 |-
 |-style="background:Lightgrey; color:black"
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 |-
 |-style="background:WhiteSmoke; color:black"
+! Batch size
+|
+*Up to 1x4" wafers
+*smaller pieces
+|-
+|-style="background:Lightgrey; color:black"
 !Allowed materials
 |
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 * SU-8
 * Metals
-|-style="background:Lightgrey; color:black"
+|-style="background:WhiteSmoke; color:black"
 ! Comment
 |