Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A1_Bor_Drive-in_furnace|A1: Boron Drive-in] | [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A1_Bor_Drive-in_furnace|A1: Boron Drive-in] | ||
! | ![http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C2_Gate_Oxide_furnace|A2: Gate Oxide]] | ||
! | ![http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A3_Phosphor_Drive-in_furnace|A3: Phosphorous Drive-in]] | ||
! | ![http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C1_Furnace_Anneal-oxide|C1: Anneal Oxide]] | ||
! | ![http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C3_Anneal-bond_furnace|C3: Anneal Bond]] | ||
! | ![http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_APOX|D1: APOX]] | ||
! | ![http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_Noble|Noble furnace]] | ||
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