Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
No edit summary |
No edit summary |
||
| Line 77: | Line 77: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
! | ! | ||
[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A1_Bor_Drive-in_furnace|'''A1: Boron Drive-in''']] | |||
![[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C2_Gate_Oxide_furnace|'''A2: Gate Oxide''']] | |||
![[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A3_Phosphor_Drive-in_furnace|'''A3: Phosphorous Drive-in''']] | |||
![[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C1_Furnace_Anneal-oxide|'''C1: Anneal Oxide''']] | |||
![[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C3_Anneal-bond_furnace|'''C3: Anneal Bond''']] | |||
![[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_APOX|'''D4: APOX''']] | |||
![[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_Noble|'''Noble furnace''']] | |||
|- | |- | ||