Jump to content

Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

← Older editNewer edit →
VisualWikitext
Mdyma (talk | contribs)
danchip
584 edits
No edit summary
Mdyma (talk | contribs)
danchip
584 edits
No edit summary
Line 77: Line 77:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!
!
|'''A1: Boron Drive-in'''
|[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A1_Bor_Drive-in_furnace|'''A1: Boron Drive-in''']]
|'''A2: Gate Oxide'''
|[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C2_Gate_Oxide_furnace|'''A2: Gate Oxide''']]
|'''A3: Phosphorous Drive-in'''
|[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A3_Phosphor_Drive-in_furnace|'''A3: Phosphorous Drive-in''']]
|'''C1: Anneal Oxide'''
|[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C1_Furnace_Anneal-oxide|'''C1: Anneal Oxide''']]
|'''C3: Anneal Bond'''
|[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C3_Anneal-bond_furnace|'''C3: Anneal Bond''']]
|'''D4: APOX'''
|[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_APOX|'''D4: APOX''']]
|'''Noble furnace'''
|[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_Noble|'''Noble furnace''']]
|-
|-


Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thermal_Process/Oxidation"