Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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* [http://www.cleanroom.byu.edu/OxideThickCalc.phtml Know time - want thickness] | * [http://www.cleanroom.byu.edu/OxideThickCalc.phtml Know time - want thickness] | ||
===Wet Oxidation=== | |||
The curves below are based on measurements in our specific furnaces and give more accurate results. | The curves below are based on measurements in our specific furnaces and give more accurate results. | ||
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image:A3_furnace_100_Si_wet_oxidation.jpg|A3 Furnace <100>-Si Wet Oxidation | image:A3_furnace_100_Si_wet_oxidation.jpg|A3 Furnace <100>-Si Wet Oxidation | ||
</gallery> | </gallery> | ||