Specific Process Knowledge/Etch/Etching of Chromium: Difference between revisions
| Line 39: | Line 39: | ||
|Etch rate | |Etch rate | ||
| | | | ||
~ | ~10-20 nm/min | ||
| | | | ||
~ | ~10-20 nm/min | ||
|- | |- | ||
|Batch size | |Batch size | ||
| Line 39: | Line 39: | ||
|Etch rate | |Etch rate | ||
| | | | ||
~ | ~10-20 nm/min | ||
| | | | ||
~ | ~10-20 nm/min | ||
|- | |- | ||
|Batch size | |Batch size | ||