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Specific Process Knowledge/Wafer cleaning: Difference between revisions

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===Wafers that go into the high temperature furnaces===
==Wafers that go into the high temperature furnaces==
As a general rule all wafers that go into the high temperature furnaces need a full RCA clean directly before the furnace step.  
As a general rule all wafers that go into the high temperature furnaces need a full RCA clean directly before the furnace step.  
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