Specific Process Knowledge/Thin film deposition/Deposition of Palladium: Difference between revisions
No edit summary |
No edit summary |
||
| Line 25: | Line 25: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
! Layer thickness | ! Layer thickness | ||
|10Å to 1µm | |10Å to 1µm* | ||
|- | |- | ||
|-style="background:Lightgrey; color:black" | |-style="background:Lightgrey; color:black" | ||
| Line 46: | Line 46: | ||
|} | |} | ||
'''*''' ''For thicknesses above 200 nm permission is requested.'' | |||