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Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

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<nowiki>*</nowiki>New clean: only right from the new clean box. It is not allowed to put them in another box first.
<nowiki>**</nowiki>These wafers must be placed in a "transport box from RCA to furnace" using the RCA carrier when doing RCA or the pre-dep carrier after pre-dep.
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thermal_Process/Oxidation"