Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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!Process temperature | !Process temperature | ||
|800-1150 C||800-1150 C||800-1150 C||800-1150 C||800-1150 C||1150 C | |800-1150 <sup>o</sup>C||800-1150 <sup>o</sup>C||800-1150 <sup>o</sup>C||800-1150 <sup>o</sup>C||800-1150 <sup>o</sup>C||1150 <sup>o</sup>C | ||
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!Cleanliness of dry oxide (rated 1-4, 1 is best) | !Cleanliness of dry oxide (rated 1-4, 1 is best) | ||