Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300: Difference between revisions
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==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool== | ==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool== | ||
[[Image:IBE_IBSD_udstyret_i_RR1.jpg| | [[Image:IBE_IBSD_udstyret_i_RR1.jpg|300x300px|thumb|IBE and IBSD: positioned in cleanroom A-1]] | ||
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<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=267 IBE/IBSD Ionfab 300+ in LabManager] | ||
==Process information== | ==Process information== | ||