Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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== General Rules == | == General Rules == | ||
For safety reasons, even fully trained users are only | For safety reasons, even fully trained users are only authorized to mount substrates into the e-beam cassettes, but not authorized to load the cassettes into the autoloader. | ||
There are two daily loading sessions where cassettes will be loaded into the autoloader by DTU Danchip personel: | There are two daily loading sessions where cassettes will be loaded into the autoloader by DTU Danchip personel: | ||
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After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader. | After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader. | ||
If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU Danchip personel unmount your substrates. | If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU Danchip personel unmount your substrates. | ||
== Manuals == | == Manuals == | ||