Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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| Line 200: | Line 200: | ||
| Green(532nm/255mm) | | Green(532nm/255mm) | ||
| 200 kHz | | 200 kHz | ||
| | | 20% | ||
| 0,55 W | | 0,55 W | ||
| 50 mm/s | | 50 mm/s | ||
| Line 215: | Line 215: | ||
| Green(532nm/255mm) | | Green(532nm/255mm) | ||
| 200 kHz | | 200 kHz | ||
| | | 25% | ||
| 0,55 W | | 0,55 W | ||
| 50 mm/s | | 50 mm/s | ||
| Line 230: | Line 230: | ||
| Green(532nm/255mm) | | Green(532nm/255mm) | ||
| 200 kHz | | 200 kHz | ||
| | | 25% | ||
| 0,55 W | | 0,55 W | ||
| 50 mm/s | | 50 mm/s | ||