Specific Process Knowledge/Thin film deposition/Deposition of NiV: Difference between revisions
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|RF Ar clean | |RF Ar clean | ||
|RF Ar clean | |RF Ar clean | ||
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! Layer thickness | ! Layer thickness | ||
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|Depending on process parameters. | |Depending on process parameters. | ||
|Depending on process parameters. | |Depending on process parameters. | ||
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