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Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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|style="background:LightGrey; color:black"|Temperature
|style="background:LightGrey; color:black"|Temperature
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*0-1000<sup>o</sup>C
*0-1000 <sup>o</sup>C
*Temperature ramp-up rate: Max 10<sup>o</sup>C/min
*Temperature ramp-up rate: Max 10 <sup>o</sup>C/min
*Temperature ramp-down rate: Relative slow (depending on the furnace temperature)
*Temperature ramp-down rate: Relative slow (depending on the furnace temperature)
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