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Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions

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During processing the furnace is rapidly heated by use of six long heating lamps situated around the furnace tube, and cooling is done (rather slowly) by use of cooling fans. The furnace is purged with a controlable nitrogen flow. There is no vacuum on the furnace.  
During processing the furnace is rapidly heated by use of six long heating lamps situated around the furnace tube, and cooling is done (rather slowly) by use of cooling fans. The furnace is purged with a controlable nitrogen flow. There is no vacuum on the furnace.  


'''The user manual, user APV, technical information and contact information can be found in LabManager:'''
'''The user manual, user APV and contact information can be found in LabManager:'''


[[image:Resist_Pyrolysis_Furnace.jpg|400x400px|right|thumb|The Resist Pyrolysis furnace. Located in the III-V Lab]]
[[image:Resist_Pyrolysis_Furnace.jpg|500x500px|right|thumb|The Resist Pyrolysis furnace located in cleanroom area A-5]]


[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=294 Resist Pyrolysis Furnace]
[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=294 Resist Pyrolysis Furnace]
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_Furnace"