Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
| Line 61: | Line 61: | ||
|Size of substrate | |Size of substrate | ||
| | | | ||
*4 | *4" in our standard bath | ||
*4", 2" in "Fumehood KOH" | *4", 2" in "Fumehood KOH" | ||
| Line 61: | Line 61: | ||
|Size of substrate | |Size of substrate | ||
| | | | ||
*4 | *4" in our standard bath | ||
*4", 2" in "Fumehood KOH" | *4", 2" in "Fumehood KOH" | ||