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Specific Process Knowledge/Back-end processing/Polishing machine: Difference between revisions

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*Performance range -->
*Performance range -->
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range
!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range
|style="background:LightGrey; color:black"|Polishing liquid
|style="background:LightGrey; color:black"|Polishing liquid
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Al2O3 (alumina) powder: 3, 9 or 20 µm
*Al2O3 (alumina) powder: 3, 9 or 20 µm
*Chemlox (for polishing)
*Chemlox (for polishing)
*SF1 Polishing Fluid (for polishing e.g. SiO2)
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|style="background:LightGrey; color:black"|Polishing cloths
|style="background:WhiteSmoke; color:black"|
*Chemcloth Polishing Cloths (for use with SF1 liquid)
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|style="background:LightGrey; color:black"|Rotation speed
|style="background:LightGrey; color:black"|Rotation speed
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