Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 55: | Line 55: | ||
|style="background:LightGrey; color:black"|Process time | |style="background:LightGrey; color:black"|Process time | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
32.5 min | 32.5 min | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
3 min / wafer | 3 min / wafer | ||
| Line 61: | Line 61: | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black" align="center" | |style="background:WhiteSmoke; color:black" align="center"| | ||
* 50 mm wafers | |||
* 100 mm wafers | |||
* 150 mm wafers | |||
|style="background:WhiteSmoke; color:black" align="center"| | |||
100 mm wafers | 100 mm wafers | ||
|- | |- | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black" align="center" | |style="background:WhiteSmoke; color:black" align="center"| | ||
All cleanroom materials | |||
|style="background:WhiteSmoke; color:black" align="center"| | |||
Silicon (with oxide, nitride, or metal films or patterning) | Silicon (with oxide, nitride, or metal films or patterning) | ||
| Line 71: | Line 77: | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||
|style="background:WhiteSmoke; color:black" align="center" | |style="background:WhiteSmoke; color:black" align="center"| | ||
1 - 25, multiple batches possible | |||
|style="background:WhiteSmoke; color:black" align="center"| | |||
1 - 25 | 1 - 25 | ||
|- | |- | ||