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Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
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*HMDS priming
*HMDS priming
*Spin coating and soft baking
*Priming, coating, and baking
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*HMDS priming
*HMDS priming
*Spin coating and soft baking
*Priming, coating, and baking
*Post-exposure baking
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!style="background:silver; color:black;" align="center" width="60"|Resist
!style="background:silver; color:black;" align="center" width="60"|Priming chemical
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|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
AZ MiR 701 (29cps)
HMDS
 
positive tone
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AZ nLOF 2020
 
negative tone
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
|style="background:LightGrey; color:black"|Coating thickness
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1 - 3 µm
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1 - 4 µm
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!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Performance
|style="background:LightGrey; color:black"|HMDS contact angle
|style="background:LightGrey; color:black"|HMDS contact angle
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
60° - 90°; standard recipe 82° (on SiO2)
60° - 90°; standard recipe 82° (on SiO2)
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!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameters
!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Process parameters
|style="background:LightGrey; color:black"|Spin speed
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10 - 9990 rpm
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|style="background:LightGrey; color:black"|Spin acceleration
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1000 - 50000 rpm/s
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|style="background:LightGrey; color:black"|Hotplate temperature
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90°C
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110°C
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|style="background:LightGrey; color:black"|HMDS priming temperature
|style="background:LightGrey; color:black"|HMDS priming temperature
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|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
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