Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions

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 [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=54 HMDS oven in LabManager]
-===Equipment performance and process related parameters===
+===Process information===
 *Recipe 4: baseline prime process with 5 min priming time
 *Recipe 5: baseline process without prime
-'''Overview of the main recipe:'''
-. Dehydration and purging nitrogen for ca. 12 min.
+'''Baseline prime process description:'''
+. Vacuum, 2 min
+. Nitrogen pump, 3.5 min
+. Heat- up, 10 min
-. Priming of HMDS vapor ca. 7 min.
+. Vacuum, 4.5 min
-. Purging prime exhaust for ca. 5 min.
+. HMDS prime, 5 min
-. Backfill, return to atmosphere pressure ca. 3. min.
+. Vacuum chamber exhaust, 3 min
-Baseline prime process description:
+. Nitrogen back-fill, 3.5 min
-Step                                              Time, min
-Vacuum                                         2
-Nitrogen pump                               3,5
-Heat- up                                        10
-Vacuum                                         4,5
-HMDS prime                                 5
-Vacuum chamber exhaust               3
-Nitrogen backfill                             3,5
-'''Overview of HMDS process:'''
+===Equipment performance and process related parameters===
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