Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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===HMDS oven=== | |||
[[Image:HMDS1.JPG|300x300px|thumb|The HMDS oven is placed in Cleanroom 3.]] | [[Image:HMDS1.JPG|300x300px|thumb|The HMDS oven is placed in Cleanroom 3.]] | ||
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Overview of HMDS process: | |||
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===Spin Track 1 + 2=== | |||
bla bla bla | |||
==BHF== | ==BHF== | ||