Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions
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|style="background:LightGrey; color:black"|Film thickness | |style="background:LightGrey; color:black"|Film thickness | ||
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*~10Å - 1µm | *~10Å - 1µm* | ||
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|style="background:LightGrey; color:black"|Deposition rate | |style="background:LightGrey; color:black"|Deposition rate | ||
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'''*''' ''For thicknesses above 200 nm permission is required.'' | |||
== Quality control (QC) for Wordentec== | == Quality control (QC) for Wordentec== | ||