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Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions

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|style="background:LightGrey; color:black"|Process Temperature
|style="background:LightGrey; color:black"|Process Temperature
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*100-200<math>^o</math>C
*100-200&deg;C  
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|style="background:LightGrey; color:black"|Process pressure
|style="background:LightGrey; color:black"|Process pressure
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==Film quality optimization==
==Film quality optimization==
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