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Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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==Optical Profiler (Sensofar)==
==Optical Profiler (Sensofar)==


[[image:Optical_profiler_1.jpg|275x275px|right|thumb|Optical Profiler (Sensofar): positioned in the characterization area (next to the Dektak XTA stylus profiler)]]
[[image:Optical_profiler_1.jpg|275x275px|right|thumb|Optical Profiler (Sensofar): positioned in the clean room F-2)]]


The PLu Neox 3D Optical Profiler (from Sensofar) has a dual-technology sensor head that combines confocal and interferometry techniques as well as thick and thin film measurement capabilities.
The PLu Neox 3D Optical Profiler (from Sensofar) has a dual-technology sensor head that combines confocal and interferometry techniques as well as thick and thin film measurement capabilities.