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Specific Process Knowledge/Characterization/XPS: Difference between revisions

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|style="background:LightGrey; color:black"|Chemical analysis
|style="background:LightGrey; color:black"|Chemical analysis
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Probing elemental composition
* [[Specific Process Knowledge/Characterization/XPS/XPS elemental composition|Probing elemental composition]]
* Chemical state identification
* [[Specific Process Knowledge/Characterization/XPS/XPS Chemical states |Chemical state identification]]
* Non destructive technique
* Non destructive technique
* Surface sensitive
* Surface sensitive
* Depth profiling possible by ion beam etch of sample
* [[Specific Process Knowledge/Characterization/XPS/XPS Depth profiling|Depth profiling]] possible by ion beam etch of sample
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!rowspan="5" style="background:silver; color:black" align="left"| Performance
!rowspan="5" style="background:silver; color:black" align="left"| Performance
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