Specific Process Knowledge/Characterization/XPS: Difference between revisions

@@ Line 63: / Line 63: @@
 |-
 |style="background:LightGrey; color:black"|Ion beam size
-|style="background:WhiteSmoke; color:black"| About 0,3x1 mm
+|style="background:WhiteSmoke; color:black"| About 3x1 mm
 |-
@@ Line 69: / Line 69: @@
 |style="background:LightGrey; color:black"|Substrate size
 |style="background:WhiteSmoke; color:black"|
-Max 60x60 mm
+Maximum 60x60 mm
 |-
 | style="background:LightGrey; color:black"|Substrate thickness
 |style="background:WhiteSmoke; color:black"|
-Max height about 20 mm
+Maximum height about 20 mm
 |-
 |}