Specific Process Knowledge/Characterization/XPS: Difference between revisions
| Line 20: | Line 20: | ||
The XPS instrument can be used to do elemental analysis, chemical state analysis on the sample surface or deeper down by a depth profiling. A comparison about techniques and instruments used for elemental analysis at Danchip can be found on the page [[Specific Process Knowledge/Characterization/Element analysis|Element analysis]]. | The XPS instrument can be used to do elemental analysis, chemical state analysis on the sample surface or deeper down by a depth profiling. A comparison about techniques and instruments used for elemental analysis at Danchip can be found on the page [[Specific Process Knowledge/Characterization/Element analysis|Element analysis]]. | ||
More about the different possibilities | More about the different possibilities of the XPS instrument is found here: | ||
*[[Specific Process Knowledge/Characterization/XPS/XPS technique|XPS technique]] | *[[Specific Process Knowledge/Characterization/XPS/XPS technique|XPS technique]] | ||
*[[Specific Process Knowledge/Characterization/XPS/XPS elemental composition|Elemental composition analysis]] | *[[Specific Process Knowledge/Characterization/XPS/XPS elemental composition|Elemental composition analysis]] | ||
*[[Specific Process Knowledge/Characterization/XPS/XPS Chemical states |Chemical state analysis]] | *[[Specific Process Knowledge/Characterization/XPS/XPS Chemical states |Chemical state analysis]] | ||
*[[Specific Process Knowledge/Characterization/XPS/XPS Depth profiling|Depth profiling]] | *[[Specific Process Knowledge/Characterization/XPS/XPS Depth profiling|Depth profiling]] | ||
==Equipment performance of XPS-ThermoScientific== | ==Equipment performance of XPS-ThermoScientific== | ||