Specific Process Knowledge/Characterization/XPS/XPS Chemical states: Difference between revisions
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[[image:Si2p.JPG| | [[image:Si2p.JPG|600x600px|left|thumb|XPS Si2p spectrum of a Si reference sample (red curve), and a Si sample that was treated in HF shortly before the measurement was done (green curve). ]] | ||
Due to the so called chemical shift, it is possible to get information about the chemical state of the probed atoms. | Due to the so called chemical shift, it is possible to get information about the chemical state of the probed atoms. | ||
The core electrons of the atoms are affected, meaning that the binding energy of the electrons are slightly shifted, when an atom is bonded to atoms of other elements. | The core electrons of the atoms are affected, meaning that the binding energy of the electrons are slightly shifted, when an atom is bonded to atoms of other elements. | ||