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Specific Process Knowledge/Characterization/XPS: Difference between revisions

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*[[Specific Process Knowledge/Characterization/XPS/XPS Chemical states |Chemical state analysis]]
*[[Specific Process Knowledge/Characterization/XPS/XPS Chemical states |Chemical state analysis]]
*[[Specific Process Knowledge/Characterization/XPS/XPS Depth profiling|Depth profiling]]
*[[Specific Process Knowledge/Characterization/XPS/XPS Depth profiling|Depth profiling]]
==Elemental analysis==
The XPS technique can be used to do elemental analysis. A comparison about techniques and instruments used for elemental analysis at Danchip can be found on the page [[Specific Process Knowledge/Characterization/Element analysis|Element analysis]].


==XPS technique==
==XPS technique==