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Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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|style="background:LightGrey; color:black"| Ion gun parameters
|style="background:LightGrey; color:black"| Ion gun parameters
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Acceleration voltage and focusing lens parameters  
* Acceleration voltages and focusing lens parameters  
* Gas inlet pressures, apertures,
* Gas inlet pressures and apertures  
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|-
|style="background:LightGrey; color:black"| Mass spectrometer parameters
|style="background:LightGrey; color:black"| Mass spectrometer parameters
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Detector biases, range
* Detector biases and range
* Scan parameters such as raster size, speeds, pattern
* Scan parameters such as raster size, speeds and pattern
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|-
|style="background:LightGrey; color:black"| Sample position
|style="background:LightGrey; color:black"| Sample position
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