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Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions

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!style="background:silver; color:black" align="left"|Performance
!style="background:silver; color:black" align="left"|Performance
|style="background:LightGrey; color:black"|Measurement accuracy depends on
|style="background:LightGrey; color:black"|Measurement accuracy depends on
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* Which atoms to be analysed
* Which atoms to be analysed
* The sample morphology (flat samples are much more suited than particles)
* The sample morphology (flat samples are much more suited than particles)
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!style="background:silver; color:black" align="left"|Process parameters
!style="background:silver; color:black" align="left" rowspan="3"|Process parameters
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|style="background:LightGrey; color:black"| Ion gun parameters
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*Syringe 1: Water (H2O)
* Acceleration voltage, lens parameters
*Syringe 2: Diiodo-methane (I2CH2)
* Gas inlet pressures, apertures,
*Syringe 3: Benzyl alcohol (C6H5CH2OH)
 
*Syringe 4: Available
*Manual dispense is also possible
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!style="background:silver; color:black" align="left" rowspan="3" |Sample requirements
!style="background:silver; color:black" align="left" rowspan="3" |Sample requirements