Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions

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==Atomika SIMS==
==Atomika SIMS==
[[Image:Equipment_SIMS.jpg|300x300px|thumb|Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).]]
[[Image:Equipment_SIMS.jpg|300x300px|thumb|Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).]]


[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&page_id=169 The Atomika SIMS in Labmanager]


The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.


'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Drop_Shape_Analyzer click here]'''
Please note that no user will be instructed on the SIMS. Danchip staff will run your samples.
 
 
== The Drop Shape Analyzer ==
 
[[image:DropShapeAnalyzer.jpg|200x200px|right|thumb|The Krüss DSA 100s Drop Shape Analyzer]]


The Krüss DSA 100S Drop Shape Analyzer will analyze the shape a drop of liquid on a surface, or suspended from a needle, in order to calculate the contact angle, or the surface tension, respectively. It is mostly used to determine the contact angle of water as a measure of the hydrophobicity/hydrophility of the sample surface.
==An overview of the performance of the SIMS==
 
 
'''The user manual, user APV(s), technical information, and contact information can be found in LabManager:'''
 
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=240  Drop Shape Analyzer in LabManager]
 
 
==An overview of the performance of the Drop Shape Analyzer==


{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
|-
|-
!style="background:silver; color:black;" align="left"|Purpose  
!style="background:silver; color:black;" align="left"|Purpose  
|style="background:LightGrey; color:black"|Imaging and analysis of of the shape of the interface between liquid and air||style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"| Determination of atomic composition
*Measurement of contact angle between sample surface and liquid
|style="background:WhiteSmoke; color:black"|
*Measurement of surface tension of liquid
* Doping level
* Sample contamination
|-
|-
!style="background:silver; color:black" align="left"|Performance
!style="background:silver; color:black" align="left"|Performance
|style="background:LightGrey; color:black"|Measurement accuracy
|style="background:LightGrey; color:black"|Measurement accuracy depends on
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Highly dependent on analysis conditions (image quality and fitting model); usually around ±0.5°. Using several measurement points is recommended.
* Which atoms to be analysed
* The sample morphology (flat samples are much more suited than particles)
|-
|-
!style="background:silver; color:black" align="left"|Process parameters
!style="background:silver; color:black" align="left"|Process parameters
|style="background:LightGrey; color:black"|Available liquids
|style="background:LightGrey; color:black"|
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Syringe 1: Water (H2O)
*Syringe 1: Water (H2O)
Line 45: Line 37:
*Manual dispense is also possible
*Manual dispense is also possible
|-
|-
!style="background:silver; color:black" align="left"|Sample requirements
!style="background:silver; color:black" align="left" rowspan="3" |Sample requirements
|style="background:LightGrey; color:black"|Substrate material allowed
|style="background:LightGrey; color:black"|Substrate material allowed
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*In principle all materials
*In principle all materials
|-
|-
|style="background:silver; color:black"|
 
|style="background:LightGrey; color:black"|Substrate size
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Up to 6" wafers. In order to measure, a few square mm's of flat surface is required.
* The samples must be cut into 5x5 or 7x7 mm pieces
* Other types of samples must be mounted onto appropriately sized carriers
|-
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Batch size
|style="background:LightGrey; color:black"|Batch size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*One sample at a time
* The sample holder carries up to 6 samples at the time
|-
|-
   
   
|}
|}

Revision as of 14:29, 24 January 2014

Feedback to this page: click here


Atomika SIMS

Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).

The Atomika SIMS in Labmanager

The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.

Please note that no user will be instructed on the SIMS. Danchip staff will run your samples.

An overview of the performance of the SIMS

Purpose Determination of atomic composition
  • Doping level
  • Sample contamination
Performance Measurement accuracy depends on
  • Which atoms to be analysed
  • The sample morphology (flat samples are much more suited than particles)
Process parameters
  • Syringe 1: Water (H2O)
  • Syringe 2: Diiodo-methane (I2CH2)
  • Syringe 3: Benzyl alcohol (C6H5CH2OH)
  • Syringe 4: Available
  • Manual dispense is also possible
Sample requirements Substrate material allowed
  • In principle all materials
Substrate size
  • The samples must be cut into 5x5 or 7x7 mm pieces
  • Other types of samples must be mounted onto appropriately sized carriers
Batch size
  • The sample holder carries up to 6 samples at the time
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