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==Atomika SIMS==
==Atomika SIMS==
[[Image:Equipment_SIMS.jpg|300x300px|thumb|Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).]]
[[Image:Equipment_SIMS.jpg|300x300px|thumb|Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).]]


[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&page_id=169 The Atomika SIMS in Labmanager]


The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.


'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Drop_Shape_Analyzer click here]'''
Please note that no user will be instructed on the SIMS. Danchip staff will run your samples.
 
 
== The Drop Shape Analyzer ==
 
[[image:DropShapeAnalyzer.jpg|200x200px|right|thumb|The Krüss DSA 100s Drop Shape Analyzer]]


The Krüss DSA 100S Drop Shape Analyzer will analyze the shape a drop of liquid on a surface, or suspended from a needle, in order to calculate the contact angle, or the surface tension, respectively. It is mostly used to determine the contact angle of water as a measure of the hydrophobicity/hydrophility of the sample surface.
==An overview of the performance of the SIMS==
 
 
'''The user manual, user APV(s), technical information, and contact information can be found in LabManager:'''
 
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=240  Drop Shape Analyzer in LabManager]
 
 
==An overview of the performance of the Drop Shape Analyzer==


{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
|-
|-
!style="background:silver; color:black;" align="left"|Purpose  
!style="background:silver; color:black;" align="left"|Purpose  
|style="background:LightGrey; color:black"|Imaging and analysis of of the shape of the interface between liquid and air||style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"| Determination of atomic composition
*Measurement of contact angle between sample surface and liquid
|style="background:WhiteSmoke; color:black"|
*Measurement of surface tension of liquid
* Doping level
* Sample contamination
|-
|-
!style="background:silver; color:black" align="left"|Performance
!style="background:silver; color:black" align="left"|Performance
|style="background:LightGrey; color:black"|Measurement accuracy
|style="background:LightGrey; color:black"|Measurement accuracy depends on
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Highly dependent on analysis conditions (image quality and fitting model); usually around ±0.5°. Using several measurement points is recommended.
* Which atoms to be analysed
* The sample morphology (flat samples are much more suited than particles)
|-
|-
!style="background:silver; color:black" align="left"|Process parameters
!style="background:silver; color:black" align="left"|Process parameters
|style="background:LightGrey; color:black"|Available liquids
|style="background:LightGrey; color:black"|
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Syringe 1: Water (H2O)
*Syringe 1: Water (H2O)
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*Manual dispense is also possible
*Manual dispense is also possible
|-
|-
!style="background:silver; color:black" align="left"|Sample requirements
!style="background:silver; color:black" align="left" rowspan="3" |Sample requirements
|style="background:LightGrey; color:black"|Substrate material allowed
|style="background:LightGrey; color:black"|Substrate material allowed
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*In principle all materials
*In principle all materials
|-
|-
|style="background:silver; color:black"|
 
|style="background:LightGrey; color:black"|Substrate size
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Up to 6" wafers. In order to measure, a few square mm's of flat surface is required.
* The samples must be cut into 5x5 or 7x7 mm pieces
* Other types of samples must be mounted onto appropriately sized carriers
|-
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Batch size
|style="background:LightGrey; color:black"|Batch size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*One sample at a time
* The sample holder carries up to 6 samples at the time
|-
|-
   
   
|}
|}
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