Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
Appearance
| Line 197: | Line 197: | ||
It is especially good for making fast accurate measurements of dielectric thin films with n<2.02 and a thickness range of 1 µm to about 15 µm. | It is especially good for making fast accurate measurements of dielectric thin films with n<2.02 and a thickness range of 1 µm to about 15 µm. | ||
'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:''' | |||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=169 FilmTek in LabManager] | |||
<br clear="all" /> | <br clear="all" /> | ||
===An overview of the performance of the Prism Coupler=== | ===An overview of the performance of the Prism Coupler=== | ||